ISO 14644-1:2015 | Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration |
ISO 14644-2:2015 | Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration |
ISO 14644-3:2019 | Cleanrooms and associated controlled environments — Part 3: Test methods |
ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
ISO 14644-6:2007(Withdrawn) | Cleanrooms and associated controlled environments — Part 6: Vocabulary |
ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
ISO 14644-8:2022 | Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC) |
ISO 14644-9:2022 | Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration |
ISO 14644-10:2022 | Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination |
ISO 14644-11 | |
ISO 14644-12:2018 | Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration |
ISO 14644-13:2017 | Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications |
ISO 14644-14:2016 | Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration |
ISO 14644-15:2017 | Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration |
ISO 14644-16:2019 | Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices |
ISO 14644-17:2021 | Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications |