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本帖最后由 ejckuo 于 2023-7-7 19:45 编辑
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(高清)ISO 14644-1:2015 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
(高清)ISO 14644-2:2015 Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
(高清)ISO 14644-3:2019 Cleanrooms and associated controlled environments — Part 3: Test methods
(扫描)ISO 14644-4:2022 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
(高清)ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
(高清)ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
(缺)ISO 14644-8:2022 Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
(缺)ISO 14644-9:2022 Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
(缺)ISO 14644-10:2022 Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination
(扫描)ISO 14644-12:2018 Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
(扫描)ISO 14644-13:2017 Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
(高清)ISO 14644-14:2016 Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
(高清)ISO 14644-15:2017 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
(扫描)ISO 14644-16:2019 Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
(缺)ISO 14644-17:2021 Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
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ISO 14644-1 2015.pdf
808.62 KB, 下载次数: 315
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ISO 14644-2 2015.pdf
313.21 KB, 下载次数: 176
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ISO 14644-3 2019.pdf
890.62 KB, 下载次数: 227
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ISO 14644-4 2022.pdf
4.43 MB, 下载次数: 258
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ISO 14644-5 2004.pdf
326.58 KB, 下载次数: 155
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ISO 14644-7 2004.pdf
779.89 KB, 下载次数: 157
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ISO 14644-12 2018.pdf
2.14 MB, 下载次数: 164
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ISO 14644-13 2017.pdf
2.16 MB, 下载次数: 168
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ISO 14644-14 2016.pdf
915.18 KB, 下载次数: 155
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ISO 14644-15 2017.pdf
746.78 KB, 下载次数: 164
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ISO 14644-16 2019.pdf
9.87 MB, 下载次数: 379
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